放电参数变化对电感耦合等离子闭式等离子体空间分布特性研究

射频电感耦合等离子体（ICP）在实际放电过程中，线圈的构型、电源参数、气压等外部工质条件的变化均会对结果产生较大影响，依靠实验很难得到多外部条件对ICP参数分布的影响机理和规律，因此需要结合仿真和实验的方法进行分析。该文通过建立感性线圈的电磁学有限元模型，分析不同线圈构型下射频电磁场在等离子体内部的空间分布，研究放电参数（线圈构型、功率大小）对等离子体分布影响和E-H模型下放电形态的跳变过程，并观察进入稳定H模式后电源参数的变化规律，为等离子体源的小型化工程应用提供理论基础。实验和仿真计算结果表明：不同线圈匝数在不同功率条件下，电磁场强度变化对等离子功率吸收和功率耦合有较大影响；当工作气压在0～20Pa时，ICP的电子密度呈轴对称分布，随着放电功率、气压的增大，等离子体吸收的功率和电离度也随之增加，其电子密度相应地增大，放电功率的增加会使得环状的等离子体区域随之扩大，在轴向、径向上的分布呈先逐渐增大而后在靠近腔室壁面区域迅速下降。     

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